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Huaqi Technology will continuously improve talents, management, and technology, cooperate and exchange with friends from all walks of life at home and abroad, establish sincere and mutually beneficial cooperation alliances, provide customers with higher quality products and more comprehensive services, and move forward towards internationalization and modernization.

公司外景圖

Qingdao Huaqi Technology Co., Ltd. specializes in semiconductor process equipment and Advanced material specialized equipment research and development, manufacturing manufacturer.

Main product series: diffusion furnace, oxidation furnace, LPCVD low-pressure chemical vapor deposition, HVPE crystal growth, vacuum furnace and semiconductor waste gas treatment, etc. Dedicated to providing advanced specialized equipment for manufacturers of semiconductor integrated circuit discrete devices, solar cells, semiconductor lighting LEDs, and magnetic materials, including processes such as compound semiconductor crystal growth, epitaxy, thin film deposition (silicon nitride, silicon oxide, polycrystalline silicon, etc.), oxidation diffusion annealing (including rapid annealing process) alloys, vacuum sintering, etc. Our company's semiconductor process equipment covers second, third, and fourth generation semiconductor materials such as silicon, gallium arsenide, gallium nitride, and high-performance magnetic material vacuum equipment (samarium cobalt, neodymium iron boron, etc.). At the same time, we have undertaken some national 863 projects (such as HVPE equipment for semiconductor white light illumination GaN growth, etc.).

Huaqi Technology has over a decade of professional R&D and manufacturing experience, and its product services are widely used in colleges, research institutes, semiconductor manufacturing, high-performance magnetic material manufacturing enterprises and factories in the industry. Huaqi Technology has an excellent research, design, manufacturing, and service team, which is a member unit of multiple associations such as the China Electronics Special Equipment Association and the China Magnetic Materials and Devices Association. It has undertaken and successfully completed a series of national key projects in the design and manufacturing of specialized equipment.

In 2008, it passed the GB/T19001-200 (ISO9001:2000) quality management system certification.

Huaqi Technology will continue to improve and enhance, sincerely providing users with higher quality and reliable products and excellent services!

Main products: specialized equipment for solar cells, solar cell diffusion furnaces, solar cell PECVD, oxidation diffusion furnace series, deposition CVD (LPCVD, PECVD), epitaxial and crystal growth (HVPE, MOCVD and VB, VGF, etc.), RTP rapid heat treatment, gas cylinder cabinets/special gas cabinets/gas source cabinets, exhaust gas treatment (SCRUBBER), vacuum heat treatment furnaces (double chamber gas quenching, single chamber, traditional tube furnaces, etc.), chain furnace series, diffusion furnace body series, Secondary piping, etc.

The quality standards and technical level of the product: close to reaching standards that surpass similar international advanced products!

Huaqi Technology will continuously improve talents, management, and technology, cooperate and exchange with friends from all walks of life at home and abroad, establish sincere and mutually beneficial cooperation alliances, provide customers with higher quality products and more comprehensive services, and move forward towards internationalization and modernization.


corporate culture

Our Strengths

Technology Embodies Our Wisdom

·More than 60 utility model patents

·High tech enterprises

·Certified by ISO 9001 Quality Management System

·30 years of experience in equipment research and development

·Director unit of China Electronics Special Equipment Industry Association

·Undertaken part of the national 863 project (HVPE equipment for semiconductor white light illumination GaN growth, etc.)


Excellent Scientific Research.Design.Manufacture.Service Team

Putting customers first, employees first, quality first, innovation as the soul, strict love and mutual assistance within and outside the circle

All Rights ?2023 Qingdao Huaqi Technology Co., Ltd魯ICP備18050447號-1

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