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Ammonia decomposition waste gas treatment machine series

Ammonia decomposition waste gas treatment

Product performance:

◆ "Pyrolysis"+"decomposition" method, energy-saving and efficient treatment of waste gas from solar cell PECVD and other equipment. SiH4 is subjected to high-temperature pyrolysis, and NH3 is directly decomposed without the need for ammonia treatment or combustion.

◆ Processing capacity, production type: 50SLM, production type: 400/600/1000/1500SLM


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