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Plasma exhaust gas treatment series

Plasma exhaust gas treatment series

Product performance:

◆ Waste gas treatment for LPCVD, PECVD, etching, etc

◆ Adopting plasma and electric heating combustion methods, internal spray water/liquid distribution circulation, liquid composition monitoring, and automatic water and liquid replenishment

◆ Processing ability, scientific research type: 100/200SLM

◆ Production type: 400/600/1000/1500SLM


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