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Special gas cabinets (cylinder cabinets), cylinder racks, proportioning cabinets, etc.: supply proportioning systems for flammable, explosive, corrosive, high-purity special gases in the semiconductor manufacturing industry.

The gas distribution and comprehensive control system remotely terminates the display of the operating status and real-time data of the gas cylinder cabinet/gas cylinder rack/proportioning cabinet through a computer, and supplies various special gases with precise and safe pressure and flow according to process requirements to the process equipment, ensuring the safe and efficient operation of the gas pipeline system.

Applied in the semiconductor industry, electronic materials, solar cell industry, biotechnology, healthcare, simulation and other fields.

Product performance:

◆ A comprehensive safety alarm device with gas leakage detection alarms (such as SiH4, PH3, HCL, etc.), smoke and flame alarms

◆ Control method: "touch screen+PLC" fully automatic control (including manual control)

◆ The gas circuit design is reasonable and complete, and the working pipeline has functions such as automatic evacuation, refilling, pressure indication, etc., and is equipped with gas cylinder weighing function

Product classification

◆ Classification by number of bottles: single bottle cabinet (rack)/two bottle cabinet (rack)/three bottle cabinet (rack)/four bottle cabinet (rack)

◆ Classification by gas: Gas cylinder cabinet (flammable/explosive/corrosive/toxic gases, SiH4, PH3, HCL, etc.) Gas cylinder rack (high-purity, argon, oxygen, etc.)