Appearance of High Temperature Diffusion Furnace

The four parts of the diffusion furnace:

Control cabinet

Pushing boat purification platform

Resistance heating furnace

Air supply cabinet

1. Control section:

The entire control cabinet is divided into five layers. The computer control part is divided into four independent parts: upper layer, middle upper layer, middle lower layer, and lower layer. Each layer controls the corresponding layer's pushing boat, furnace temperature, and gas path, serving as the control center for the diffusion/oxidation system.

At the bottom of the control cabinet, there is a four tube control system for pushing the boat control device, protection circuit, and circuit transfer control board. The front cover plate is equipped with three-phase power indicator lights and lighting, purification, and exhaust switches.

2. Pushing boat purification section

The top of the pushboat purification cabinet is equipped with lighting fixtures; On the front, there is a high-efficiency horizontal laminar flow filter and a four layer push boat screw, guide rail auxiliary transmission system, and SiC cantilever propeller seat. The right end of the screw is equipped with a driving stepper motor, and limit switches are installed at both ends of the guide rail.

The lower part of the cabinet is equipped with a control circuit adapter board and a purification fan.

Resistance heating furnace section

The resistance heating furnace cabinet has six floors in total. The top layer is equipped with water-cooled radiators and exhaust fans, and the top of the waste gas chamber is equipped with an exhaust port. After being connected to an external negative pressure exhaust duct, residual waste gas from the process can be taken away.

The middle part is divided into four layers to place four furnace tubes. Each layer is supported and fixed by four slope brackets, and their positions have been aligned with the push boat feeding mechanism - screw, guide rail pair - during installation, so they must not be easily moved

3. Gas source section

The gas supply cabinet is divided into five levels. There is a detoxification port at the top to eliminate harmful gases that may leak during the source replacement process.

On the top of the cabinet, there are three inlet ports for process gas and one inlet port for compressed air. Below the port, there are pressure reducing valves and shut-off valves installed to control and adjust the inlet pressure. Corresponding to the gas circuit, each layer is equipped with corresponding solenoid valves, pneumatic valves, filters, one-way valves, mass flow controllers, and source bottle cold traps.

The bottom of the cabinet is equipped with a circuit adapter board for the mass flow controller power supply, control switch, fuse, etc., as well as a main power input adapter board for the equipment.